William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
A series of polyimides was synthesized to facilitate the study of several structure/property relationships, including relative permittivity, moisture absorption, free volume, and viscoelastic transitions. This series was based on hexafluoroisopropylidene bis(phthalic anhydride) and various diamines, with the intention of having a number of fluorine/hydrogen and symmetric/asymmetric analog sets. Since several of the fluorinated diamines were exceptionally unreactive, a multistep polycondensation polymerization technique was developed to obtain materials of sufficient molecular weight for property evaluation. Effects of fluorine incorporation on the aforementioned properties are reported. © 1994, American Chemical Society. All rights reserved.
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
Frank R. Libsch, Takatoshi Tsujimura
Active Matrix Liquid Crystal Displays Technology and Applications 1997
A.B. McLean, R.H. Williams
Journal of Physics C: Solid State Physics
S. Cohen, J.C. Liu, et al.
MRS Spring Meeting 1999