Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Segmented or block poly(hydroxy ether-siloxane) copolymers that are both chemically cross-linked and microphase separated have been synthesized. In this work, the molecular weight of the siloxane block lengths varied from 900 to 12400g/mol, and the hydroxy ether block lengths varied from 340 to 3700g/mol. Calorimetrie, dynamic mechanical, and small-angle X-ray scattering measurements showed that higher block length oligomers gave networks with a more well-defined two-phase morphology. The mechanical behavior of the networks depended on the continuous phase with ultimate elongations ranging from 50 to 180% and moduli ranging from 1.0 to 600 MPa. © 1988, American Chemical Society. All rights reserved.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Thomas H. Baum, Carl E. Larson, et al.
Journal of Organometallic Chemistry
A. Ney, R. Rajaram, et al.
Journal of Magnetism and Magnetic Materials
F.J. Himpsel, T.A. Jung, et al.
Surface Review and Letters