Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
A well-defined high molecular weight poly(3-hydroxybutyrate) was synthesized by "living"/controlled ring-opening polymerization (ROP) of β-butyrolactone (BL) using a metal-free catalytic system. The ROP was initiated from either primary alcohol or carboxylic acid added with 1 equiv of a stable carbene, i.e., 1,3,4-triphenyl-4,5-dihydro-1H-1,2,4-triazol-5-ylidene carbene, 1. Interestingly, perfect control over molecular weight (M n up to 32 000 g·mol -1). molecular weight distribution (M w/M n ∼ 1.1 - 1.3) and end group fidelity was attained using t-BuOH as the only polymerization solvent at 80 °C. Structural and kinetics studies highlighted an anionic polymerization mechanism where the protonated 1 (1-H) played the role of associated counterion. Attesting for the control of the ROP, amphiphilic block copolymers were further synthesized by polymerization of BL from poly(ethylene oxide) α-methoxy, ω-carboxylic acid macroinitiator while their tensioactive properties were evidenced by the pendant drop method. © 2007 American Chemical Society.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
J.H. Kaufman, Owen R. Melroy, et al.
Synthetic Metals
R.J. Gambino, N.R. Stemple, et al.
Journal of Physics and Chemistry of Solids
Min Yang, Jeremy Schaub, et al.
Technical Digest-International Electron Devices Meeting