J.M.E. Harper, C. Cabral Jr., et al.
Journal of Applied Physics
Texture formation in Ti-Ta alloy thin films on Si(001) and polysilicon substrates, was investigated using in situ and ex situ x-ray diffraction. Diffraction patterns were collected every 0.5 s during phase transformation kinetic studies. Results indicated that the addition of Ta enhanced the C49-C54 phase transition and changed the preferred orientation of C54 TiSi2 film. In situ and ex situ results showed that at 6 at.% Ta concentration, films on Si(001) and polysilicon developed a strongly oriented C54(010) texture along the sample normal.
J.M.E. Harper, C. Cabral Jr., et al.
Journal of Applied Physics
C. Cabral Jr., J. Kedzierski, et al.
VLSI Technology 2004
A. Quintero, M. Libera, et al.
Journal of Materials Research
A.S. Özean, K.F. Ludwig Jr., et al.
MRS Proceedings 2002