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SCC 2007
Naga Ayachitula, Melissa Buco, et al.
SCC 2007
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
David L. Shealy, John A. Hoffnagle
SPIE Optical Engineering + Applications 2007
Robert F. Gordon, Edward A. MacNair, et al.
WSC 1985