Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Let - 2 s c £ 2. In this paper we find the precise upper and lower bounds on die nth Taylor coefficient an of functions f(z) = z + cz% + akz typically real in the unit disk for n = 3, 4.In addition all the extremal functions are identified. © 1973 American Mathematical Society.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
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ISIT 2003
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AAAI 2025