Characterization of line width variation
Alfred K. Wong, Antoinette F. Molless, et al.
SPIE Advanced Lithography 2000
We consider ill-posed problems of the form g(t) = ∫01k(t, s)f(s)dts, 01 ≤ t ≤ 1 where g and K are given, and we must compute. The Tikhonov regularizaron procedure replaces (1) by a one-parameter family of minimization problems Minimize (formula presented) where Ω is a smoothing norm chosen by the user. We demonstrate by example that the choice of ft is not simply a matter of convenience. We then show how this choice affects the convergence rate, and the condition of the problems generated by the regularization. An appropriate choice for depends upon the character of the compactness of K and upon the smoothness of the desired solution. © 1979 American Mathematical Society.
Alfred K. Wong, Antoinette F. Molless, et al.
SPIE Advanced Lithography 2000
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