P.E. Batson
Physica B: Condensed Matter
The system of computer control of STEM operation for EELS acquisition is described. The ability to obtain analytical information from 1 nm sized areas during a 15 min integration time is illustrated. The system of hardware and software is discussed in general terms to highlight the organizational philosophy which allows complex and adaptable behavior with a minimum of construction effort. © 1982.
P.E. Batson
Physica B: Condensed Matter
R.A. Kiehl, P.E. Batson, et al.
Physical Review B
P.E. Batson
Microscopy of Semiconducting Materials 1991
V. Narayanan, V.K. Paruchuri, et al.
VLSI Technology 2006