J.A. Barker, D. Henderson, et al.
Molecular Physics
Paper
The Si(001)/SiO2 interface
Abstract
The atomic structure of Si(001)/SiO2 interfaces, produced by the oxidation of initially smooth Si surfaces, is discussed. Soft X-ray spectroscopy shows the detailed interfacial atomic configuration to depend sensitively on the preparation conditions. © 1989.
Related
I. Morgenstern, K.A. Müller, et al.
Physica B: Physics of Condensed Matter
J.H. Kaufman, Owen R. Melroy, et al.
Synthetic Metals
Joy Y. Cheng, Daniel P. Sanders, et al.
SPIE Advanced Lithography 2008