G. Will, N. Masciocchi, et al.
Zeitschrift fur Kristallographie - New Crystal Structures
A surface acoustic wave (SAW) sensor was used to study the re sponse of thin polyimide films to variations of relative humidity and tempera ture. The relationship between these responses and the relative adhesion strength of these films applied with and without adhesion promoter is of partic ular interest since it could have application as a nondestructive, relative measure of adhesion strength. The results show clear differences in the com. © 1992, Sage Publications. All rights reserved.
G. Will, N. Masciocchi, et al.
Zeitschrift fur Kristallographie - New Crystal Structures
E. Babich, J. Paraszczak, et al.
Microelectronic Engineering
Joy Y. Cheng, Daniel P. Sanders, et al.
SPIE Advanced Lithography 2008
A.B. McLean, R.H. Williams
Journal of Physics C: Solid State Physics