Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Polymers containing allylic and benzylic carbonate repeating units have been prepared by phase-transfer catalyzed polycondensation of activated bis-carbonates or carbamates and diols. The polymers are highly susceptible to thermal depolymerization and revert to small molecules when heated to temperatures which vary from 140 to 230°mperatures are reduced to well below 100°C if catalytic amounts of acid are added to the polycarbonates. The thermolysis or acidolysis of bis allylic or benzylic carbonates provides a convenient route to aromatic compounds as demonstrated with both models and polymers. The polycarbonates can be used to formulate highly sensitive resist materials with potential for self-development of positive images. Some benzylic polycarbonates which produce polymerizable divinyl monomers upon thermolysis can be used to create negative images in a process which includes both depolymerization and photocrosslinking. © 1987, The Society of Polymer Science, Japan. All rights reserved.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Frank R. Libsch, Takatoshi Tsujimura
Active Matrix Liquid Crystal Displays Technology and Applications 1997
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
Michiel Sprik
Journal of Physics Condensed Matter