J.R. Thompson, Yang Ren Sun, et al.
Physica A: Statistical Mechanics and its Applications
Paper
Thermodynamic Calculations of the Ge-H-CI System
Abstract
The partial pressures of the gas species GeCl4, GeCl2, GeHCl3, HC1, and H2 in equilibrium with Ge solid have been calculated in the temperature range 400°-1223°K at chlorine to hydrogen ratios ranging from 10-4 to 10. The theoretical efficiency for the deposition of germanium as applied to an open tube epitaxial system is discussed. Comparisons are made to the Si-H-Cl system. © 1972, The Electrochemical Society, Inc. All rights reserved.
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