Properties of AI2O3 Films Deposited from the AICI3, CO2, and H2 System
- V.J. Silvestri
- C.M. Osburn
- et al.
- 2019
- JES
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14 results for V.J. Silvestri
Al Coverage of Surface Steps at SiO2 Insulated Polycrystalline Si Boundaries: Al Evaporation in Vacuum and Low Pressure Ar
- V.J. Silvestri
- V.L. Rideout
- et al.
- 2019
- JES
Pre- and Postepitaxial Gettering of Oxidation and Epitaxial Stacking Faults in Silicon
- M.C. Chen
- V.J. Silvestri
- et al.
- 2019
- JES
Deposition Techniques and Heat Transfer Properties of Porous Aluminum
- V.J. Silvestri
- K.S. Sachar
- 2019
- JES
Single Crystal Silicon Films on Amorphous Insulators: Growth by Lateral Nucleated Epitaxy Using Scanning Laser and Electron Beams and Evaluation by Electron Backscattering Contrast
- T.O. Sedgwick
- R.H. Geiss
- et al.
- 2019
- JES
Post-Epitaxial Polysilicon and Si3N4 Gettering in Silicon
- M.C. Chen
- V.J. Silvestri
- 2019
- JES
Submicron epitaxial films
- B. Ginsberg
- G.R. Srinivasan
- 2019
- JES
MOSFET's with Polysilicon Gates Self-Aligned to the Field Isolation and to the Source and Drain Regions
- V. Leo-Rideout
- Victor J. Silvestri
- 1979
- IEEE T-ED
Some properties of chemically vapor deposited films of AlxOyNz on silicon
- E.A. Irene
- V.J. Silvestri
- et al.
- 1975
- Journal of Electronic Materials
Chemical vapor deposition of AlxOyNz films
- V.J. Silvestri
- E.A. Irene
- et al.
- 1975
- Journal of Electronic Materials