H.D. Dulman, R.H. Pantell, et al.
Physical Review B
Paper
TiO2 Antireflection Coatings by a Low Temperature Spray Process
Related
Julien Autebert, Aditya Kashyap, et al.
Langmuir
Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Q.R. Huang, Ho-Cheol Kim, et al.
Macromolecules