Joy Y. Cheng, Daniel P. Sanders, et al.
SPIE Advanced Lithography 2008
No abstract available.
Joy Y. Cheng, Daniel P. Sanders, et al.
SPIE Advanced Lithography 2008
Imran Nasim, Melanie Weber
SCML 2024
I. Morgenstern, K.A. Müller, et al.
Physica B: Physics of Condensed Matter
R. Ghez, M.B. Small
JES