U. Wieser, U. Kunze, et al.
Physica E: Low-Dimensional Systems and Nanostructures
Voltages have been measured in the scanning electron microscope by passing the secondary electrons through an electrostatic energy analyser between the specimen and the electron detector. Experimental results are described in which (i) some sources of image contrast are investigated and (ii) the reverse characteristic of a p-into-n diffused device is measured by a contactless method.
U. Wieser, U. Kunze, et al.
Physica E: Low-Dimensional Systems and Nanostructures
S.F. Fan, W.B. Yun, et al.
Proceedings of SPIE 1989
Ellen J. Yoffa, David Adler
Physical Review B
Min Yang, Jeremy Schaub, et al.
Technical Digest-International Electron Devices Meeting