Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
The evolution of the electronic structure of thin films of polyacrylonitrile has been studied by X-ray photoelectron spectroscopy, XPS (or ESCA) after pyrolysis at different temperatures. By comparison with the results of model VEH calculations, the evolution of the chemical structure can be compared with predictions in the literature. Evolution to an aromatic ring polymer chain structure is observed to occur at temperatures as low as 300°C. © 1986.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
A. Reisman, M. Berkenblit, et al.
JES
Arvind Kumar, Jeffrey J. Welser, et al.
MRS Spring 2000
Mitsuru Ueda, Hideharu Mori, et al.
Journal of Polymer Science Part A: Polymer Chemistry