XY table and tilting stage for scanning electron microscope (SEM)

Oliver C. Wells

doi:10.1063/1.1134018

Review of Scientific Instruments

Paper

02 Sep 2008

XY table and tilting stage for scanning electron microscope (SEM)

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Abstract

This paper describes a low-vibration specimen stage in which the specimen is held by a block which slides on Teflon pads over the lower surface of the SEM lens. It provides X, Y, and tilting motions.

Paper

Schlieren method as applied to magnetic recording heads in the scanning electron microscope

Oliver C. Wells, Matthias Brunner

Applied Physics Letters

Paper

Discussion of ways to energy-filter the electron backscattering pattern (EBSP) in the scanning electron microscope (SEM)

Oliver C. Wells

Microscopy and Microanalysis

Conference paper

Applications of image diagnostics to metrology quality assurance and process control

John A. Allgair, Victor V. Boksha, et al.

SPIE Advanced Microelectronic Manufacturing 2003

Paper

Fundamental theorem for type‐1 magnetic contrast in the scanning electron microscope (SEM)

Oliver C. Wells

Journal of Microscopy

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Abstract

Related

Schlieren method as applied to magnetic recording heads in the scanning electron microscope

Discussion of ways to energy-filter the electron backscattering pattern (EBSP) in the scanning electron microscope (SEM)

Applications of image diagnostics to metrology quality assurance and process control

Fundamental theorem for type‐1 magnetic contrast in the scanning electron microscope (SEM)