Oliver C. Wells, Ping-Chin Cheng
Journal of Applied Physics
Paper
XY table and tilting stage for scanning electron microscope (SEM)
Abstract
This paper describes a low-vibration specimen stage in which the specimen is held by a block which slides on Teflon pads over the lower surface of the SEM lens. It provides X, Y, and tilting motions.
Related
Conference paper
Past, present, and future of backscatter electron (BSE) imaging
Oliver C. Wells, Michael S. Gordon, et al.
ScMi 2012
John A. Allgair, Victor V. Boksha, et al.
SPIE Advanced Microelectronic Manufacturing 2003
Oliver C. Wells, Richard J. Savoy
IEEE Transactions on Magnetics