Contrast Enhancement and Resist Wall Profile Control by Surface Crosslinkage
- H. Hiraoka
- 1988
- J. Photopolym. Sci. Tech.
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32 results for Hiroyuki Hiraoka
Sub-halfmicron negative resist systems by image reversal
- K. Chiong
- H. Hiraoka
- 1989
- Proceedings of SPIE 1989
Enhancement of RIE resistance of conventional resist materials
- H. Hiraoka
- 1989
- Proceedings of SPIE 1989
Direct patterning of polyimide by pulsed electron beams in soft vacuum
- Jayaram Krisinaswamy
- Lumin Li
- et al.
- 1989
- Proceedings of SPIE 1989
Non-linear photochemistry of polymer films: laser ablation of poly (n-vinylcarbazole)
- Hiroshi Masuhara
- Hiroyuki Hiraoka
- et al.
- 1987
- Chemical Physics Letters
Resist image enhancement by UV-, soft vacuum pulsed electron beams and organometallic compounds
- Hiroyuki Hiraoka
- 1987
- Microelectronic Engineering
SIMULTANEOUS VAPOR DEPOSITION OF METAL AND MONOMERIC COMPOUNDS: LITHOGRAPHIC APPLICATIONS.
- H. Hiraoka
- J. Duran
- 1986
- Microlithography 1986
DEEP UV PHOTOLITHOGRAPHY WITH COMPOSITE PHOTORESISTS MADE OF POLY(OLEFIN SULFONES).
- H. Hiraoka
- L.W. Welsh Jr.
- 1983
- ACS National Meeting 1983
High resolution polymer pattern fabrications with Low energy proton beams
- H. Hiraoka
- 1984
- Microlithography 1984
Polymer degradation in reactive ion etching and its possible application to all dry processes
- H. Hiraoka
- L.W. Welsh Jr.
- 1981
- Radiation Physics and Chemistry