Surface cleaning by electrostatic removal of particles
- Douglas W. Cooper
- H.L. Wolfe
- et al.
- 1989
- Annual Technical Meeting of Institute of Environmental Sciences 1989
Publications
This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.
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15 results for J.T.C. Yeh
Chromium mask damage in excimer laser projection processing
- J.T.C. Yeh
- 1989
- Proceedings of SPIE 1989
Josephson effect in Nb nanobridges
- R.B. Laibowitz
- A.N. Broers
- et al.
- 2008
- Applied Physics Letters
Copper deposition by electron cyclotron resonance plasma
- A. Sugerrnan
- F.E. Turene
- et al.
- 1993
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Surface cleaning by electrostatic removal of particles
- Douglas Cooper
- Henry Wolfe
- et al.
- 1990
- Aerosol Science and Technology
Laser ablation of polymers
- J.T.C. Yeh
- 1986
- JVSTA
Emission spectra, surface quality, and mechanism of excimer laser etching of polyimide films
- G. Koren
- J.T.C. Yeh
- 1984
- Applied Physics Letters
Emission spectra and etching of polymers and graphite irradiated by excimer lasers
- G. Koren
- J.T.C. Yeh
- 1984
- Journal of Applied Physics
Magnetic field enhanced reactive ion etching of polyimide
- J.T.C. Yeh
- K.R. Grebe
- et al.
- 1984
- JVSTA
Mechanical properties of In-based eutectic alloy solders used in Josephson packaging
- J.T.C. Yeh
- 1984
- Cryogenics