EXCIMER LASER PROJECTION LITHOGRAPHY ON A FULL-FIELD SCANNING PROJECTION SYSTEM.
- R.T. Kerth
- K. Jain
- et al.
- 1986
- IEEE Electron Device Letters
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8 results for M.R. Latta
Optical recording in the blue using a frequency-doubled diode laser
- W.J. Kozlovsky
- A.G. Dewey
- et al.
- 1992
- SPIE Optical Data Storage Topical Meeting 1992
Effect of track crossing on focus servo signals: Feedthrough
- M.R. Latta
- T.C. Strand
- et al.
- 1992
- SPIE Optical Data Storage Topical Meeting 1992
Measurement of polarization components using a pour detector polarimeter
- M.R. Latta
- S.L. Heesacker
- 1989
- Proceedings of SPIE 1989
Measuring and modeling optical diffraction from subwavelength features
- Xu Wang
- Jeffrey Mason
- et al.
- 2001
- Journal of the Optical Society of America A: Optics and Image Science, and Vision
Beam intensity uniformization by mirror folding
- M.R. Latta
- K. Jain
- 1984
- Optics Communications
Excimer laser projection photoetching
- M.R. Latta
- R. Moore
- et al.
- 1984
- Journal of Applied Physics
Design techniques for forming 488-nm holographic lenses with reconstruction at 633 nm
- M.R. Latta
- R.V. Pole
- 1979
- Applied Optics