An electron microscope investigation of the effect of phosphorous doping on the plasma etching of polycrystalline silicon
- E.A. Irene
- E. Tierney
- et al.
- 2019
- JES
Publications
Date
Featured collections
Popular topics
15 results for B.J. Ginsberg
Self-Aligned Bipolar Epitaxial Base n-p-n Transistors by Selective Epitaxy Emitter Window (SEEW) Technology
- Joachim N. Burghartz
- Siegfried R. Mader
- et al.
- 1991
- IEEE T-ED
Selective Epitaxial Refill for In-Trench Device Fabrication
- J.N. Burghartz
- J. Warnock
- et al.
- 1989
- Electronics Letters
Electrical characteristics of diodes fabricated in selective-epitaxial silicon wells
- David Harame
- Barry Ginsberg
- et al.
- 1987
- Solid State Electronics
Observation of oxidation-enhanced and oxidation-retarded diffusion of antimony in silicon
- T.Y. Tan
- B.J. Ginsberg
- 1983
- Applied Physics Letters