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H.-J. Güntherodt- H.P. Lang
- M.K. Baller
- et al.
- 1999
- MEMS 1999
- 1998
- Applied Physics A: Materials Science and Processing
- P. Streckeisen
- S. Rast
- et al.
- 1998
- Applied Physics A: Materials Science and Processing
- 1998
- Applied Physics A: Materials Science and Processing
- R. Berger
- E. Delamarche
- et al.
- 1998
- Applied Physics A: Materials Science and Processing
- M. Bammerlin
- R. Lüthi
- et al.
- 1998
- Applied Physics A: Materials Science and Processing
- M.A. Lantz
- R. Hoffmann
- et al.
- 2006
- Physical Review B - CMMP
- 2006
- Microelectronic Engineering
- François Huber
- Martin Hegner
- et al.
- 2006
- Biosensors and Bioelectronics
- 2005
- Journal of Applied Physics