Publications

This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.

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138 results for B.S. Meyerson

Low-temperature silicon epitaxy by ultrahigh vacuum/chemical vapor deposition
- - B.S. Meyerson
- 1986
- Applied Physics Letters Applied Physics Letters
EXPERIMENTAL AND CHEMICAL KINETIC MODELLING STUDY OF SILICON CVD FROM MONOSILANE AND DISILANE.
- - B.S. Meyerson
  - B.A. Scott
  - et al.
- 1986
- Chemtronics
Summary Abstract: Comparison between the adsorption of PH₃ and B₂H₆ on Si surfaces as related to the CVD of Si
- - M.L. Yu
  - D.J. Vitkavage
  - et al.
- 1985
- JVSTA
Disilane: A new silicon doping source in metalorganic chemical vapor deposition of GaAs
- - T.F. Kuech
  - B.S. Meyerson
  - et al.
- 1984
- Applied Physics Letters
Silicon doping of GaAs and Al_xGa_1-xAs using disilane in metalorganic chemical vapor deposition
- - T.F. Kuech
  - E. Veuhoff
  - et al.
- 1984
- Journal of Crystal Growth
The Adsorption of PH₃ on Si(100) and its Effect on the Coadsorption of SiH₄
- - Ming L. Yu
  - B.S. Meyerson
- 1984
- JVSTA
The preparation of in situ doped hydrogenated amorphous silicon by homogeneous chemical vapor deposition
- - B.S. Meyerson
  - B.A. Scott
  - et al.
- 1983
- Journal of Applied Physics
Homogeneous chemical vapor deposition of amorphous semiconductor thin films
- - B.A. Scott
  - W.L. Olbricht
  - et al.
- 1983
- Journal of Non-Crystalline Solids