INTERACTION BETWEEN Ti AND SiO//2.
- C.-Y. Ting
- M. Wittmer
- et al.
- 1983
- VLSI Science and Technology 1983
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34 results for C.-Y. Ting
AMBIENT GAS EFFECTS ON THE REACTION OF TITANIUM WITH SILICON.
- Subramanian S. Iyer
- C.-Y. Ting
- et al.
- 1983
- ECS Meeting 1983
AMBIENT GAS EFFECTS ON THE REACTION OF TITANIUM WITH SILICON.
- Subramanian S. Iyer
- C.-Y. Ting
- et al.
- 1983
- VLSI Science and Technology 1983
TiN as a high temperature diffusion barrier for arsenic and boron
- C.-Y. Ting
- 1984
- Thin Solid Films
Electromigration Lifetime Sudies of Submicrometer-Linewidth Al-Cu Conductors
- Subramanian S. Iyer
- Chung-YU Ting
- 1984
- IEEE T-ED
SILICIDE FOR CONTACTS AND INTERCONNECTS.
- C.-Y. Ting
- 1983
- IEDM 1983
Investigation of the Al/TiSi2/Si contact system
- Chung Yu Ting
- Marc Wittmer
- 1983
- Journal of Applied Physics
Redistribution of As during Pd2Si formation: Electrical measurements
- M. Wittmer
- C.-Y. Ting
- et al.
- 1983
- Journal of Applied Physics
Oxidation of silicide thin films: TiSi2
- F.M. D'Heurle
- E.A. Irene
- et al.
- 1983
- Applied Physics Letters
Investigation of Tin films reactively sputtered using a sputter gun
- K.Y. Ahn
- M. Wittmer
- et al.
- 1983
- Thin Solid Films