Effects of deposition methods on the temperature-dependent resistivity of tunasten films
- L. Krusin-Elbaum
- K.Y. Ahn
- et al.
- 1986
- JVSTA
Publications
Date
Featured collections
Popular topics
34 results for C.-Y. Ting
Thermal stability of TiSi2 on mono- and polycrystalline silicon
- C.Y. Wong
- L.K. Wang
- et al.
- 1986
- Journal of Applied Physics
A Self-Aligned 1-μm-Channel CMOS Technology with Retrograde n-Well and Thin Epitaxy
- Yuan Taur
- Genda J. Hu
- et al.
- 1985
- IEEE T-ED
A Self-Aligned 1-μm-Channel CMOS Technology with Retrograde n-Well and Thin Epitaxy
- Yuan Taur
- Genda J. Hu
- et al.
- 1985
- IEEE Journal of Solid-State Circuits
TiN as a high temperature diffusion barrier for arsenic and boron
- C.-Y. Ting
- 1984
- Thin Solid Films
Electromigration Lifetime Sudies of Submicrometer-Linewidth Al-Cu Conductors
- Subramanian S. Iyer
- Chung-YU Ting
- 1984
- IEEE T-ED
Investigation of the Al/TiSi2/Si contact system
- Chung Yu Ting
- Marc Wittmer
- 1983
- Journal of Applied Physics
Oxidation of silicide thin films: TiSi2
- F.M. D'Heurle
- E.A. Irene
- et al.
- 1983
- Applied Physics Letters
Redistribution of As during Pd2Si formation: Electrical measurements
- M. Wittmer
- C.-Y. Ting
- et al.
- 1983
- Journal of Applied Physics
Investigation of Tin films reactively sputtered using a sputter gun
- K.Y. Ahn
- M. Wittmer
- et al.
- 1983
- Thin Solid Films