The Phase-Shifting Mask II: Imaging Simulations and Submicrometer Resist Exposures
- Marc D. Levenson
- Scott Lindsey
- et al.
- 1984
- IEEE T-ED
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Some methods for producing straight achromatic white-light fringes of variable contrast and constant average irradiance
- Douglas S. Goodman
- 1982
- Applied Optics