COMPARISON OF BACKSCATTERED ELECTRON AND OPTICAL IMAGES FOR SUBMICRON DEFECT DETECTION.
- Michael G. Rosenfield
- Douglas S. Goodman
- et al.
- 1984
- Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena
Publications
Date
Featured collections
Popular topics
22 results for Douglas S. Goodman
Some methods for producing straight achromatic white-light fringes of variable contrast and constant average irradiance
- Douglas S. Goodman
- 1982
- Applied Optics