Oxidation kinetics of ZrN thin films
- L. Krusin-Elbaum
- M. Wittmer
- 1983
- Thin Solid Films
Publications
Date
Featured collections
Popular topics
46 results for M. Wittmer
Atomic motion of dopant during interfacial silicide formation
- M. Wittmer
- C.-Y. Ting
- et al.
- 1983
- Thin Solid Films
ZrN diffusion barrier in aluminum metallization schemes
- L. Krusin-Elbaum
- M. Wittmer
- et al.
- 1983
- Thin Solid Films
Growth kinetics and diffusion mechanism in Pd2Si
- M. Wittmer
- K.N. Tu
- 1983
- Physical Review B
Redistribution of As during Pd2Si formation: Ion channeling measurements
- M. Wittmer
- C.-Y. Ting
- et al.
- 1982
- Journal of Applied Physics
The use of titanium-based contact barrier layers in silicon technology
- C.-Y. Ting
- M. Wittmer
- 1982
- Thin Solid Films