A Novel Borderless Contact/Interconnect Technology Using Aluminum Oxide Etch Stop for High Performance SRAM and Logic
- S. Subbanna
- D.L. Harame
- et al.
- 1993
- IEDM 1993
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16 results for S.B. Brodsky
A 5Gb/s 16×16 Si-bipolar crosspoint switch
- Hyun Shin
- James Warnock
- et al.
- 1992
- ISSCC 1992
Sub-400-ps ISL circuits
- Ching-Te Chuang
- G.P. Li
- et al.
- 1986
- IEEE Electron Device Letters
A high performance low temperature 0.3 μm CMOS on SIMOX
- G. Shahidi
- B. Bucclot
- et al.
- 1992
- VLSI Technology 1992
Low-resistance submicron CVD W interlevel via plugs on Al-Cu-Si
- R.V. Joshi
- S.B. Brodsky
- et al.
- 1989
- VMIC 1989
LPCVD TUNGSTEN SILICIDE WITH TITANIUM UNDERLAYER.
- R.V. Joshi
- L. Krusin-Elbaum
- et al.
- 1985
- VLSI Technology 1985
INTERACTION BETWEEN Ti AND SiO//2.
- C.-Y. Ting
- M. Wittmer
- et al.
- 1983
- ECS Meeting 1983
INTERACTION BETWEEN Ti AND SiO//2.
- C.-Y. Ting
- M. Wittmer
- et al.
- 1983
- VLSI Science and Technology 1983
Interaction Between ti and SiO2
- C.-Y. Ting
- M. Wittmer
- et al.
- 2019
- JES
Diffusion barrier properties of TiN films for submicron silicon bipolar technologies
- E. Kobeda
- J. Warnock
- et al.
- 1992
- Journal of Applied Physics