Photoluminescence of defects introduced by deuterium plasmas in silicon
- H. Weman
- J.L. Lindström
- et al.
- 1989
- Materials Science and Engineering B
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15 results for J.L. Lindstrom
Effects of deuterium plasma treatments on the electrical properties of boron-doped silicon
- A. Henry
- O.O. Awadelkarim
- et al.
- 1989
- Materials Science and Engineering B
Surface processes in CF4/O2 reactive etching of silicon
- Gottlieb S. Oehrlein
- Steve W. Robey
- et al.
- 1988
- Applied Physics Letters
Thermal donors and carbonoxygen defects in silicon
- J.L. Lindström
- H. Weman
- et al.
- 1987
- physica status solidi (a)
On the Complex of the Oxygen Interstitial and the Silicon Interstitial in Silicon
- J.L. Lindstrom
- B.C. Svensson
- et al.
- 1984
- physica status solidi (a)