Mechanism of oxygen plasma etching of polydimethyl siloxane films
- N.J. Chou
- C.H. Tang
- et al.
- 1985
- Applied Physics Letters
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22 results for E. Babich
SUMMARY ABSTRACT: CHARACTERISTICS OF ORGANOSILICON POLYMERS IMMERSED IN GASEOUS PLASMAS.
- J. Paraszczak
- E. Babich
- et al.
- 1984
- Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena