Optimization of ESCAP photoresist for x-ray lithography
- A.T.S. Pomerene
- K.E. Petrillo
- et al.
- 1994
- Microlithography 1994
Publications
This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.
Date
Featured collections
Popular topics
127 results for Hiroshi Ito
Molecular design for stabilization of chemical amplification resist toward airborne contamination
- Hiroshi Ito
- William P. England
- et al.
- 1993
- Microlithography 1993
Influence of polymer properties on airborne chemical contamination of chemically amplified resists
- W.D. Hinsberg
- Scott A. MacDonald
- et al.
- 1993
- Microlithography 1993
Living anionic polymerization of silyl-protected hydroxystyrenes at room temperature
- Hiroshi Ito
- Arno Knebelkamp
- et al.
- 1992
- ACS PMSE 1992
Effects of polymer end groups on chemical amplification
- Hiroshi Ito
- William P. England
- et al.
- 1992
- Microlithography 1992
Polymerization of exo-methylene styrenic monomers. Effect of α,α-cyclization on reactivity and stereoregularity
- Hiroshi Ito
- Mitsuru Ueda
- 1991
- ACS Division of Polymer Chemistry Atlanta Meeting 1991
Negative chemical amplification resist systems based on polyhydroxystyrenes and N-substituted imides or aldehydes
- Hiroshi Ito
- Klaas Schildknegt
- et al.
- 1991
- Microlithography 1991
Photochemically-induced acid-catalyzed polymer reactions for microlithography
- Hiroshi Ito
- 1990
- ACS Division of Polymer Chemistry Washington DC Meeting 1990
Chemical amplification for the design of sensitive E-beam and X-ray resist systems
- Hiroshi Ito
- 1990
- ACS Division of Polymer Chemistry Washington DC Meeting 1990
Acid-catalyzed depolymerization of poly(α-methylstyrene) derivatives
- Hiroshi Ito
- William P. England
- 1989
- ACS National Meeting 1989