Interferometer for phase measurements in phase shift masks
- Derek B. Dove
- Trieu C. Chieu
- et al.
- 1992
- BACUS Symposium on Photomask Technology and Management 1992
This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.