Angular dependence of preferential sputtering and composition in aluminum-copper thin films
- P. Rudeck
- J.M.E. Harper
- et al.
- 1988
- Applied Physics Letters
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15 results for Peter M. Fryer
Relationship between substrate bias and microstructure in magnetron-sputtered AlCu films
- T. Lin
- K.Y. Ahn
- et al.
- 1987
- Thin Solid Films
HIGH TEMPERATURE PROCESS LIMITATIONS ON TiSi//2.
- C.-Y. Ting
- F.M. d'Heurle
- et al.
- 1984
- ECS Meeting 1984
AMBIENT GAS EFFECTS ON THE REACTION OF TITANIUM WITH SILICON.
- Subramanian S. Iyer
- C.-Y. Ting
- et al.
- 1983
- VLSI Science and Technology 1983
AMBIENT GAS EFFECTS ON THE REACTION OF TITANIUM WITH SILICON.
- Subramanian S. Iyer
- C.-Y. Ting
- et al.
- 1983
- ECS Meeting 1983