IIIB-5 Fabrication of Thin Gate Oxide MOSFET's Using Low-Temperature Plasma-Enhanced Chemical-Vapor-Deposited SiO2
- J. Li
- J. Batey
- et al.
- 1987
- IEEE T-ED
Publications
Date
Featured collections
Popular topics
18 results for J. Batey
Electrical Characteristics of Very Thin SiO2 Deposited at Low Substrate Temperatures
- J. Batey
- E. Tierney
- et al.
- 1987
- IEEE Electron Device Letters
Electrical resistivity and radiation damage in boro-hydro-nitride x-ray lithography mask substrates
- S.S. Dana
- J. Batey
- et al.
- 1987
- Microelectronic Engineering
Direct observation of ballistic electrons in silicon dioxide
- D.J. DiMaria
- M.V. Fischetti
- et al.
- 1986
- Physical Review Letters
Energy band alignment in GaAs:(Al,Ga)As heterostructures: The dependence on alloy composition
- J. Batey
- S.L. Wright
- 1986
- Journal of Applied Physics
Low-temperature deposition of high-quality silicon dioxide by plasma-enhanced chemical vapor deposition
- J. Batey
- E. Tierney
- 1986
- Journal of Applied Physics
Energy band alignment in GaAs:(Al,Ga)As heterostructures
- J. Batey
- S.L. Wright
- 1986
- Surface Science
Energy band-gap discontinuities in GaAs:(Al,Ga)As heterojunctions
- J. Batey
- S.L. Wright
- et al.
- 1985
- Journal of Applied Physics