Publications

This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.

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9 results for Shravan Matham

Missing Via Defect Capture Enhancement Using a Novel, High-Precision Array Segmentation Inspection Technique
- - Graham Jensen
  - Vidyasagar Anantha
  - et al.
- 2021
- ASMC 2021
Fundamental characterization of stochastic variation for improved single-expose EUV patterning at aggressive pitch
- - Jennifer Church
  - Luciana Meli
  - et al.
- 2020
- SPIE Advanced Lithography 2020
High-throughput, nondestructive assessment of defects in patterned epitaxial films on silicon by machine learning-enabled broadband plasma optical measurements
- - Shravan Matham
  - C. Durfee
  - et al.
- 2019
- ASMC 2019
Defect detection strategies and process partitioning for SE EUV patterning
- - Luciana Meli
  - Karen Petrillo
  - et al.
- 2018
- SPIE Advanced Lithography 2018
Development of TiO₂ containing hardmasks through PEALD deposition
- - Anuja De Silva
  - Indira Seshadri
  - et al.
- 2017
- SPIE Advanced Lithography 2017
Printability and actinic AIMS review of programmed mask blank defects
- - Erik Verduijn
  - Pawitter Mangat
  - et al.
- 2017
- SPIE Advanced Lithography 2017
Fundamental characterization of stochastic variation for improved single-expose extreme ultraviolet patterning at aggressive pitch
- - Jennifer Church
  - Luciana Meli
  - et al.
- 2020
- J. Micro/Nanolithogr. MEMS MOEMS
Defect detection strategies and process partitioning for single-expose EUV patterning
- - Luciana Meli
  - Karen Petrillo
  - et al.
- 2019
- J. Micro/Nanolithogr. MEMS MOEMS
Development of TiO₂ containing hardmasks through plasma-enhanced atomic layer deposition
- - Anuja De Silva
  - Indira Seshadri
  - et al.
- 2017
- J. Micro/Nanolithogr. MEMS MOEMS