Acid generation and acid diffusion in photoresist films
- D.R. McKean
- R.D. Allen
- et al.
- 1992
- Microlithography 1992
Publications
Date
Featured collections
Popular topics
59 results for Paul H. Kasai
Polymer effects on the photochemistry of triarylsulfonium salts
- D.R. McKean
- R.D. Allen
- et al.
- 1991
- SPIE San Diego 1991
Polymeric matrix effects on the efficiency of acid generation from triphenylsulfonium salts
- D.R. McKean
- U. Schaedeli
- et al.
- 1989
- ACS PMSE 1989
Penultimate effect in radical copolymerization of 2- trifluoromethylacrylates
- Hiroshi Ito
- Brian C. Trinque
- et al.
- 2008
- J Polym Sci Part A
Electron spin resonance study of as-deposited and annealed (Hf O2) x (Si O2) 1-x high- κ dielectrics on Si
- B.B. Triplett
- P.T. Chen
- et al.
- 2007
- Journal of Applied Physics
Hydrogen bonding in lubricants for hard disk drives
- Paul H. Kasai
- Vedantham Raman
- 2006
- Tribology Letters
Interaction between disk lubricants and solvents in the dip-coating process
- P.H. Kasai
- C. Spiese
- 2004
- Tribology Letters
Z-dol versus Z-tetraol: Bonding and durability in magnetic hard disk application
- P.H. Kasai
- V. Raman
- 2004
- Tribology Letters
Microstructure and properties of ultrathin amorphous silicon nitride protective coating
- Bing K. Yen
- Richard L. White
- et al.
- 2003
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Degradation of disk lubricant: Ramification in disk drives and direct detection by TOF-SIMS
- Paul H. Kasai
- Vedantham Raman
- 2003
- Tribology Letters