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J. Hoffnagle- David L. Shealy
- John A. Hoffnagle
- et al.
- 2006
- SPIE Optics + Photonics 2006
- David L. Shealy
- John A. Hoffnagle
- 2006
- Applied Optics
- John A. Hoffnagle
- David L. Shealy
- 2005
- SPIE Optics + Photonics 2005
- 2005
- SPIE Optics + Photonics 2005
- David L. Shealy
- John A. Hoffnagle
- 2005
- SPIE Optics + Photonics 2005
- Rik Harbers
- John A. Hoffnagle
- et al.
- 2005
- Applied Physics Letters
- G.M. Wallraff
- D. Medeiros
- et al.
- 2005
- Microlithography 2005
- G.M. Wallraff
- D. Medeiros
- et al.
- 2004
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
- William Hinsberg
- Gregory Wallraff
- et al.
- 2004
- Microlithography 2004
- Alan E. Rosenbluth
- Gregg Gallatin
- et al.
- 2004
- SPIE Advanced Lithography 2004