Characteristics of low-k and ultralow-k PECVD deposited SiCOH films
- A. Grill
- V.V. Patel
- et al.
- 2002
- MRS Proceedings 2002
Publications
Date
Featured collections
Popular topics
50 results for V.V. Patel
SiCOH dielectrics: From low-κ to Ultralow-κ by PECVD
- A. Grill
- D. Edelstein
- et al.
- 2001
- ADMETA 2001
Novel low-k dual-phase materials prepared by PECVD
- A. Grill
- V.V. Patel
- 2000
- MRS Proceedings 2000
Diamond-like carbon coatings for vacuum and space tribology
- C. Donnet
- T. Le Mogne
- et al.
- 1997
- ESA SP
Bonding, interfacial effects and adhesion in dlc
- A. Grill
- B.S. Meyerson
- et al.
- 1989
- Proceedings of SPIE 1989
Temperature and Bias Effects on the Physical and Tribological Properties of Diamond-Like Carbon
- A. Grill
- V.V. Patel
- et al.
- 2019
- JES
Interface modifications for improving the adhesion of a-c:H films to metals
- A. Grill
- B.S. Meyerson
- et al.
- 2011
- Journal of Materials Research
Optical and tribological properties of heat-treated diamond-like carbon
- A. Grill
- V.V. Patel
- et al.
- 2011
- Journal of Materials Research
Ultralow dielectric constant pSiCOH films prepared with tetramethylcyclotetrasiloxane as skeleton precursor
- A. Grill
- V.V. Patel
- 2008
- Journal of Applied Physics
Interface engineering for high interfacial strength between SiCOH and porous SiCOH interconnect dielectrics and diffusion caps
- A. Grill
- D. Edelstein
- et al.
- 2008
- Journal of Applied Physics