Nucleation and growth of silicon on Si02 during SiH4 low pressure chemical vapor deposition as studied by hydrogen desorption titration
- M. Liehr
- S.S. Dana
- et al.
- 1992
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
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5 results for S.S. Dana
Chemical vapor deposition of rough-morphology silicon films over a broad temperature range
- S.S. Dana
- M. Anderle
- et al.
- 1993
- Applied Physics Letters
Kinetics of nucleation and growth of Si on SiO2 in very low pressure SiH4 chemical vapor deposition
- S.S. Dana
- M. Liehr
- et al.
- 1992
- Applied Physics Letters
Crystallization of sol-gel derived lead zirconate titanate thin films
- S.S. Dana
- K.F. Etzold
- et al.
- 1991
- Journal of Applied Physics
Electrical resistivity and radiation damage in boro-hydro-nitride x-ray lithography mask substrates
- S.S. Dana
- J. Batey
- et al.
- 1987
- Microelectronic Engineering