Publications

This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.

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7 results for R.A. DellaGuardia

A high performance 90 nm SOI technology with 0.992 μm² 6T-SRAM cell
- - Mukesh Khare
  - S. Ku
  - et al.
- 2002
- IEDM 2002
Ash-induced modification of porous and dense SiCOH inter-level-dielectric (ILD) materials during damascene plasma processing
- - T. Dalton
  - N. Fuller
  - et al.
- 2004
- IITC 2004
Methods for comparing contact hole shrinking techniques with 248 nm single layer and bilayer photoresists
- - Karen Petrillo
  - John Simons
  - et al.
- 2002
- Microlithography 2002
Opportunities and challenges in ultra low k dielectrics for interconnect applications
- - S. Purushothaman
  - S.V. Nitta
  - et al.
- 2001
- Technical Digest-International Electron Devices Meeting
A new positive DUV photoresist optimized for 0.25 μm isolated lines
- - T. Lindsay
  - G.G. Barclay
  - et al.
- 1997
- Microelectronic Engineering
Determination of Helium presence in the mask/wafer gap of X-ray lithography steppers
- - Juan R. Maldonado
  - Ron DellaGuardia
  - et al.
- 1995
- Microelectronic Engineering
X-ray transmission through low atomic number particles
- - R.A. DellaGuardia
  - David Seeger
  - et al.
- 1989
- Microelectronic Engineering