Publications

3 results for D. Katcoff

Thermoelastic effects on x-ray lithography masks under pulsed irradiation
- - Iqbal Shareef
  - Juan R. Maldonado
  - et al.
- 1990
- Microelectronic Engineering
The use of simulation in semiconductor technology development
- - D.C. Cole
  - E.M. Buturla
  - et al.
- 1990
- Solid State Electronics
Fully scaled 0.5 μm MOS circuits by synchrotron radiation X-ray lithography: Devices fabrication and overlay evaluation
- - J. Silverman
  - V. Dimilia
  - et al.
- 1989
- Microelectronic Engineering