GaAs-oxide removal using an electron cyclotron resonance hydrogen plasmaZ. LuM.T. Schmidtet al.1991Applied Physics Letters
Gaas surface oxidation and deoxidation using electron cyclotron resonance oxygen and hydrogen plasmasD.V. PodlesnikM.T. Schmidtet al.1991Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Interdiffusion between Si substrates and YBaCuO filmsQ.Y. MaX. Wuet al.1989Physica C: Superconductivity and its applications