Slope control of molybdenum lines etched with reactive ion etching
- Yue Kuo
- J.R. Crowe
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
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Reactive ion etching of plasma enhanced chemical vapor deposition amorphous silicon and silicon nitride: Feeding gas effects
- Yue Kuo
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Characterization of Indium Tin Oxide and Reactive Ion Etched Indium Tin Oxide Surfaces
- Yue Kuo
- 1990
- Japanese Journal of Applied Physics
Thin Film Technologies In Active Matrix Addressing System Of Lcds
- Yue Kuo
- 1989
- Proceedings of SPIE 1989
Factors affecting reactive ion etching of corning 7059 glass
- Yue Kuo
- J.R. Crowe
- 1989
- Proceedings of SPIE 1989
Reactive ion etching of a multicomponent glass substrate
- Yue Kuo
- J.R. Crowe
- 1989
- Proceedings of SPIE 1989