Enhanced sputtering of one species in the processing of multielement thin films
- S. Berg
- C. Nender
- et al.
- 1992
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
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4 results for S. Motakef
Highly selective sputtering of silicon from TiSi2 at elevated temperature
- J.M.E. Harper
- S. Motakef
- et al.
- 1992
- Applied Physics Letters
Stability of C49 and C54 phases of TiSi2 under ion bombardment
- S. Motakef
- J.M.E. Harper
- et al.
- 1991
- Journal of Applied Physics
X-ray photoelectron spectroscopy and ellipsometry studies of the electrochemically controlled adsorption of benzotriazole on copper surfaces
- S.L. Cohen
- V. Brusic
- et al.
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films