Double-beam laser absorption spectroscopy: shot noise-limited performance at baseband with a novel electronic noise canceler
- Kurt L. Haller
- P.C.D. Hobbs
- 1991
- SPIE Optics, Electro-Optics, and Laser Applications in Science and Engineering 1991
Publications
5 results for Kurt L. Haller
Rastered laser light scattering studies during plasma processing: Particle contamination trapping phenomena
- Gary S. Selwyn
- J. Heidenreich
- et al.
- 1991
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Particle trapping phenomena in radio frequency plasmas
- Gary S. Selwyn
- John E. Heidenreich
- et al.
- 1990
- Applied Physics Letters
In-situ Particulate Contamination Studies In Process Plasmas
- Gary S. Selwyn
- John S. McKillop
- et al.
- 1989
- Microelectronic Integrated Processing 1989
In situ plasma contamination measurements by HeNe laser light scattering: A case study
- J.S. Mckillop
- Kurt L. Haller
- et al.
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films