Efficient laser cleaning of small particulates using pulsed laser irradiation synchronized with liquid-film deposition
- A.C. Tam
- W. Zapka
- et al.
- 1991
- SPIE Microelectronic Processing Integration 1991
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8 results for Winfrid Ziemlich
Laser cleaning: Laser‐induced removal of particles from surfaces
- W. Zapka
- Winfrid Ziemlich
- et al.
- 1993
- Advanced Materials for Optics and Electronics
"Laser cleaning" removes particles from surfaces
- W. Zapka
- Winfrid Ziemlich
- et al.
- 1993
- Microelectronic Engineering
Laser-cleaning techniques for removal of surface particulates
- Andrew C. Tam
- Wing P. Leung
- et al.
- 1992
- Journal of Applied Physics
Liquid film enhanced laser cleaning
- W. Zapka
- A.C. Tam
- et al.
- 1992
- Microelectronic Engineering
Efficient pulsed laser removal of 0.2 μm sized particles from a solid surface
- W. Zapka
- Winfrid Ziemlich
- et al.
- 1991
- Applied Physics Letters
The electron beam proximity printing lithography, a candidate for the 0.35 and 0.25 micron chip generations
- U. Behringer
- W. Haug
- et al.
- 1991
- Microelectronic Engineering
Laser cleaning of wafer surfaces and lithography masks
- W. Zapka
- A.C. Tam
- et al.
- 1991
- Microelectronic Engineering