Paper
The DX centre
T.N. Morgan
Semiconductor Science and Technology
Laser-induced removal of particles from surfaces was demonstrated. Such "laser cleaning" can be performed on the bare contaminated surface or with additional micronthickness liquid film coverage on the surface. With the latter "steam laser cleaning" we achieved removal of epoxy, alumina, silicon, and gold particles of size 0.1 μm to 10 μm from silicon surfaces. The proposed mechanism of particle ejection is described. © 1993.
T.N. Morgan
Semiconductor Science and Technology
K.A. Chao
Physical Review B
Eloisa Bentivegna
Big Data 2022
Joy Y. Cheng, Daniel P. Sanders, et al.
SPIE Advanced Lithography 2008