Arrayed lithography using STM-based microcolumns
- T. H. Philip Chang
- Lawrence P. Muray
- et al.
- 1993
- SPIE Advanced Optical Technologies 1993
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Arrayed miniature electron beam columns
- T.H.P. Chang
- L.P. Muray
- et al.
- 1993
- Microelectronic Engineering
Miniature Electron-Optical Columns
- T.H.P. Chang
- D. Kern
- et al.
- 1991
- IEEE T-ED