Erik H. Anderson, D. Kern, et al.
Microelectronic Engineering
Paper
Miniature Electron-Optical Columns
Abstract
Miniaturized electron-optical systems based on a field emission microsource and a microlens for probe forming have been studied. The performance of systems with dimensions (length and diameter) in the submillimeter to millimeters range can exceed that of a conventional system over a wide range of potentials (100 V to 10 kV) and working distances (up to 10 mm). © 1991 IEEE
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