Adverse Chemical Effects on the Plasma-Deposited Amorphous Silicon Carbide Passivation Layer of Thermal Ink-Jet Thin-Film HeatersP. GendlerL.S. Chang2002Chemistry of Materials
An analysis of thermal stresses in a multilayer thin film printheadJ.-H. JouL. Hsuet al.1991Thin Solid Films
Thermal, mechanical and chemical effects in the degradation of the plasma-deposited α-SiC:H passivation layer in a multilayer thin-film deviceL.S. ChangP. Gendleret al.1991Journal of Materials Science